nanostrukturierter, ultrakompakter, elektro-optischer Modulatoren in
(220 nm x 450 nm) an der TU Berlin.
- © Meister/Schweda
Silicon Photonics deals with the miniaturization
of optic and electronic components and allows for the assembly of
highly complex integrated photonic circuits. These integrated circuits
can be produced using the same facilities and mature process steps as
for the production of microelectronic circuits (CMOS). In this way, a
cost efficient mass production of chips showing optical and electronic
functionalities at the same time can be realized.
During several research projects a variety of passive building blocks as waveguides, micro resonators, and spectral filters as well as active electro-optical components have been developed and characterized. These include Raman lasers, electro-optic modulators, switches and delay generators.
The layouts with the photonic structures have been processed at the facilities of the project partner IHP using their 130 nm SiGe BiCMOS-pilot line with 248 nm DUV lithography on 200 mm SOI wafers and have been characterized afterwards in our workgroup.
Zimmermann, L., Gajda, A., Winzer, G., Richter, H., Voigt, K., Meister, S., Rhee, H., Theiss, C., Al-Saadi, A., Franke B., Kupijai, S., Woggon, U., Tillack, B., Petermann, K., Integrated Photonics Research, Silicon and Nano-Photonics (IPR), Rio Grande, PuertoRico; 2013
Meister, S., Franke, B., Eichler, H.,, Kupijai, S.,, Al-Saadi, A.,, Zimmermann, L.. Photonic Integrated Circuits for Optical Communication, Optik & Photonik, 7, 2, p.59–62, , DOI: 10.1002/opph.20129