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Based on the micro resonators with 1- dimensional photonic crystal mirrors, ultra small electro- optic Fabry-Pérot-modulators have been developed. Using a novel comb shaped NMD (node matched diode) geometry the worldwide smallest silicon modulator with Gbit/s switching speeds is now available and allows for significantly reduced footprints. This becomes important especially for the scaling of bandwidth using multiple data channels. The modulators have a minimum length of 8.8 µm in waveguides with cross section of 220 nm x 450 nm. The validation of this type of modulator is actually funded from the BMBF through the VIP-project “SILIMOD”.

Fig. 3: Electro- optic modulator in a silicon waveguide with comb shaped diode geometry

Meister, S., Rhee, H., Al-Saadi, A., Franke, B. A. et al.: Matching p-i-n-junctions and optical modes enables fast and ultra-small silicon modulators. Optics Express. 21, 16210; 2013.

Al-Saadi, A., Eichler, H. J., Meister, S.: High Speed Silicon Electro-Optic Modulator with p-i-n Comb Diode. Optical and Quantum Electronics. 44, 125-131; 2012.

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