TU Berlin

AG LehmannSU8030 SEM

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Hitachi SU8030 SEM


The Hitachi high-resolution scanning electron microscope (SEM) is the ultimate instrument for surface analysis. It bridges the gap between conventional SEMs and TEMs with its excellent specification:

  • 1 nm ultra high-resolution SEM
  • cold field emitter
  • triple-detection-system with ExB filter
  • STEM and EDX detectors
  • low kV and deceleration function
  • 3step antikontamination.

This state-of-the-art instrument is operated by ZELMI.


The microscope is financed by the German Research Foundation (DFG) and various working groups.



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