FEI Helios Nanolab 600 FIB

The Focused Ion Beam (FIB) is the Nano-Workbench in our building. Finanzed by the EFRE-Project "Nano-Werkbank" [2] by Prof. Eisebitt and ZELMI, the FIB/SEM allows both sputtering and deposition of material on the nanometer scale:

• high resolution scanning electron microscope (SEM) and focused ion beam (FIB)
• target preparation of TEM-Lamella and SEM-samples
• nanolithography / -structuring
• 6 detectors
• 3 Gas inlet systems
• air lock
• plasma cleaner
• micromanipulator for TEM-samples lift-out