Inhalt des Dokuments
FEI Helios Nanolab 600 FIB
[1]- © ZELMI
The Focused Ion Beam (FIB) is the Nano-Workbench in our building. Finanzed by the EFRE-Project "Nano-Werkbank" [2] by Prof. Eisebitt and ZELMI, the FIB/SEM allows both sputtering and deposition of material on the nanometer scale:
- high resolution scanning electron microscope (SEM) and focused ion beam (FIB)
- target preparation of TEM-Lamella and SEM-samples
- nanolithography / -structuring
- 6 detectors
- 3 Gas inlet systems
- air lock
- plasma cleaner
- micromanipulator for TEM-samples lift-out
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