We develop optical elements specifically for the soft x-ray regime with wavelengths around 1 nm - 10 nm. Most optics in this spectral range is diffractive and its generation requires nano- and microstructuring. To test novel concepts, it is thus important to be able to precisely manufacture and analyze specifically designed nanostructures. The electron microscopy images show a three dimensional test structure produced by ion assisted Pt deposition and focussed ion beam milling at the NANO-WERKBANK FIB.