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3D test structure, top view (top) and side view (bottom). Elevated Pt structure ("Sprungbrett") above a circular aperture in a gold mask. Greek letters were cut into these elements at various positions to provide high resolution test structures.
Lupe [1]
Lupe [2]

We develop optical elements specifically for the soft x-ray regime with wavelengths around 1 nm - 10 nm. Most optics in this spectral range is diffractive and its generation requires nano- and microstructuring. To test novel concepts, it is thus important to be able to precisely manufacture and analyze specifically designed nanostructures. The electron microscopy images show a three dimensional test structure produced by ion assisted Pt deposition and focussed ion beam milling at the NANO-WERKBANK FIB [3].

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