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FEI Helios Nanolab 600 FIB

Lupe

The Focused Ion Beam (FIB) is the Nano-Workbench in our building. Finanzed by the EFRE-Project "Nano-Werkbank" by Prof. Eisebitt and ZELMI, the FIB/SEM allows both sputtering and deposition of material on the nanometer scale:

  • high resolution scanning electron microscope (SEM) and focused ion beam (FIB)
  • target preparation of TEM-Lamella and SEM-samples
  • nanolithography / -structuring
  • 6 detectors
  • 3 Gas inlet systems
  • air lock
  • plasma cleaner
  • micromanipulator for TEM-samples lift-out
Lupe

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